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Annealing of Damage in GaAs and InP after Implantation of Cd and In
Pfeiffer, Wulf, Deicher, Manfred, Kalish, R., Keller, R., Magerle, R., Moriya, N., Pross, P., Skudlik, H., Wichert, Th., Wolf, HerbertVolume:
83-87
Year:
1992
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.83-87.1481
File:
PDF, 441 KB
1992