Micro-scratch test of DLC films on Si substrates prepared by bipolar-type plasma based ion implantation
S. Nakao, J. Kim, J. Choi, S. Miyagawa, Y. Miyagawa, M. IkeyamaVolume:
201
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2006.08.152
File:
PDF, 645 KB
english, 2007