Dynamic Response of an Air-Bearing Displacement Sensor for...

Dynamic Response of an Air-Bearing Displacement Sensor for on-Machine Surface Form Measurement

Lee, Kang Won, Ito, So, Shimizu, Yuki, Gao, Wei, Tanaka, Katsutoshi, Fukuta, Masahiko, Kai, Yoshiaki
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Volume:
523-524
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.523-524.836
Date:
November, 2012
File:
PDF, 1.64 MB
english, 2012
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