Effect of negative pulsed high-voltage-bias on diamond-like carbon thin film preparation using capacitively coupled radio-frequency plasma chemical vapor deposition
Y. Ohtsu, H. Noda, C. Nakamura, T. Misawa, H. Fujita, M. Akiyama, C. DiplasuVolume:
201
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2006.09.057
File:
PDF, 998 KB
english, 2007