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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Study of CMOS-compatible Copper Etching for Organic Coating
Lambert, Magali, Rostam-Khani, Patrick, Ten Veen, Jacoline, Van Nimwegen, Leon, Frederix, FilipYear:
2009
Language:
english
DOI:
10.1149/1.3202635
File:
PDF, 332 KB
english, 2009