Plasma biasing to control the growth conditions of...

Surface and Coatings Technology 2007 Vol. 201; Iss. 8

Plasma biasing to control the growth conditions of diamond-like carbon

André Anders, Nitisak Pasaja, Sunnie H.N. Lim, Tim C. Petersen, Vicki J. Keast
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Volume:
201
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2006.09.313
File:
PDF, 574 KB
english, 2007
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