ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - Wafer-Area-Saving Test Structures and Measurement Method for the Characterization of Interconnect Resistance and Capacitance in Nanometer Technologies
Qin, Xiaojing, Jiang, Lele, Cheng, YuhuaYear:
2010
Language:
english
DOI:
10.1149/1.3360613
File:
PDF, 171 KB
english, 2010