Vacuum arc filtered metal plasma application in hybrid technologies of ion-beam and plasma material processing
I.B. Stepanov, A.I. Ryabchikov, N.A. Nochovnaya, Y.P. Sharkeev, I.A. Shulepov, I.A. Ryabchikov, D.O. Sivin, S.V. FortunaVolume:
201
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2006.09.320
File:
PDF, 686 KB
english, 2007