High frequency short-pulsed plasma-immersion ion implantation or deposition (HFSPPI3D)
A.I. Ryabchikov, I.A. Ryabchikov, I.B. StepanovVolume:
201
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2006.09.321
File:
PDF, 226 KB
english, 2007