Ion projection surface structuring with noble gas ions at 75 keV
W.H. Bruenger, A.H. Dietzel, H. LoeschnerVolume:
201
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2006.09.326
File:
PDF, 1.02 MB
english, 2007