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Epitaxial Growth of NbN Thin Films at Room Temperature by Ion-Beam Sputtering Deposition
Takei, Koji, Nagai, KazutoshiVolume:
20
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.20.993
Date:
May, 1981
File:
PDF, 433 KB
1981