Pattern formation of Si surfaces by low-energy sputter erosion
K. Zhang, F. Rotter, M. Uhrmacher, C. Ronning, H. Hofsäss, J. KrauserVolume:
201
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2006.09.329
File:
PDF, 521 KB
english, 2007