Detection of planar defects caused by ion irradiation in Si using molecular dynamics
S.T. Nakagawa, G. Betz, H.J. WhitlowVolume:
201
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2006.09.332
File:
PDF, 373 KB
english, 2007