Performance Evaluation of Ultra-Precision Motion Controlled...

Key Engineering Materials 2008 Vol. 381-382

Performance Evaluation of Ultra-Precision Motion Controlled Positioning Stage

Buice, Eric S., Smith, S.T., Hocken, Robert J., Trumper, D.L., Otten, D.
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Volume:
381-382
Year:
2008
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.381-382.497
File:
PDF, 1.96 MB
english, 2008
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