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Integrated Approach for Modeling of Heat Transfer and Microdefect Formation during CZ Silicon Single Crystal Growth
Prostomolotov, A.I., Verezub, N.A.Volume:
131-133
Year:
2008
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.131-133.283
File:
PDF, 1.06 MB
english, 2008