Multi-component nitride coatings derived from Ti–Al–Cr–Si–V...

Surface and Coatings Technology 2007 Vol. 201; Iss. 14

Multi-component nitride coatings derived from Ti–Al–Cr–Si–V target in RF magnetron sputter

C.H. Lin, J.G. Duh, J.W. Yeh
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Volume:
201
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2006.11.041
File:
PDF, 1.13 MB
english, 2007
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