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Carbon film deposition by powerful ion beams
A.I. Ryabchikov, A.V. Petrov, N.M. Polkovnikova, V.K. Struts, Yu.P. Usov, V.P ArfyevVolume:
201
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2006.11.045
File:
PDF, 361 KB
english, 2007