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Synthesis and characterization of nanocrystalline ZrNxOy thin films on Si by ion plating
Jia-Hong Huang, Kai-Hsuan Chang, Ge-Ping YuVolume:
201
Year:
2007
Language:
english
Pages:
10
DOI:
10.1016/j.surfcoat.2006.12.007
File:
PDF, 1.38 MB
english, 2007