Irradiation effects of liquid cluster ion beams on silicon surfaces
Gikan H. Takaoka, Masakazu Kawashita, Hidetaka Noguchi, Kazuya NakayamaVolume:
201
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2006.12.035
File:
PDF, 541 KB
english, 2007