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Interaction and Migration Properties of Ion Beam Induced Point Defects in Crystalline Silicon: Basic Research and Technological Relevance
Rimini, Emanuele, Coffa, Salvatore, Libertino, Sebania, Mannino, G., Priolo, F., Privitera, VittorioVolume:
153-155
Year:
1998
Language:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.153-155.137
File:
PDF, 1.48 MB
english, 1998