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Influence of external bias on the surface morphology of a-C:H films grown by electron cyclotron resonance chemical vapor deposition
J.G. Buijnsters, L. VázquezVolume:
201
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2007.03.055
File:
PDF, 293 KB
english, 2007