Quartz Crystal Microbalance for Silicon Surface Organic Contamination
Habuka, Hitoshi, Suzuki, Kisho, Okamura, Shigeru, Shimada, Manabu, Okuyama, KikuoVolume:
152
Year:
2005
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1864472
File:
PDF, 116 KB
english, 2005