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Liquid injection MOCVD of TiO2 and SrTiO3 thin films from [Ti(OPri)2(tbaoac)2]: Film properties and compatibility with [Sr(thd)2]
Reji Thomas, Raghunandan Bhakta, Peter Ehrhart, Roland A. Fischer, Rainer Waser, Anjana DeviVolume:
201
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2007.04.038
File:
PDF, 885 KB
english, 2007