Low-k dielectrics on base of silicon carbon nitride films

Low-k dielectrics on base of silicon carbon nitride films

Nadezhda Fainer, Yuri Rumyantsev, Marina Kosinova, Eugeni Maximovski, Valeri Kesler, Victor Kirienko, Fedor Kuznetsov
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Volume:
201
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2007.04.046
File:
PDF, 529 KB
english, 2007
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