Low-k dielectrics on base of silicon carbon nitride films
Nadezhda Fainer, Yuri Rumyantsev, Marina Kosinova, Eugeni Maximovski, Valeri Kesler, Victor Kirienko, Fedor KuznetsovVolume:
201
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2007.04.046
File:
PDF, 529 KB
english, 2007