Knudsen cell mass spectrometry applied to the investigation of organometallic precursors vapours
Perrine Violet, Ioana Nuta, Christian Chatillon, Elisabeth BlanquetVolume:
201
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2007.04.051
File:
PDF, 421 KB
english, 2007