Silicon CVD on powders in fluidized bed: Experimental and...

Silicon CVD on powders in fluidized bed: Experimental and multifluid Eulerian modelling study

L. Cadoret, N. Reuge, S. Pannala, M. Syamlal, C. Coufort, B. Caussat
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Volume:
201
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2007.04.119
File:
PDF, 875 KB
english, 2007
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