Approach to control deposition of ultra thin films from...

Surface and Coatings Technology 2007 Vol. 201; Iss. 22-23

Approach to control deposition of ultra thin films from metal organic precursors: Ru deposition

Igor K. Igumenov, Pyotr P. Semyannikov, Sergei V. Trubin, Natalia B. Morozova, Nikolay V. Gelfond, Alexander V. Mischenko, John A. Norman
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Volume:
201
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2007.04.129
File:
PDF, 775 KB
english, 2007
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