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Batch ALD: Characteristics, comparison with single wafer ALD, and examples
Ernst Granneman, Pamela Fischer, Dieter Pierreux, Herbert Terhorst, Peter ZagwijnVolume:
201
Year:
2007
Language:
english
Pages:
9
DOI:
10.1016/j.surfcoat.2007.05.009
File:
PDF, 1.20 MB
english, 2007