High-speed etching of amorphous silicon using pin-to-plate...

Surface and Coatings Technology 2007 Vol. 202; Iss. 4-7

High-speed etching of amorphous silicon using pin-to-plate dielectric barrier discharge

Se-Jin Kyung, Jae-Beom Park, Yong-Hyuk Lee, June-Hee Lee, Geun-Young Yeom
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Volume:
202
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2007.05.083
File:
PDF, 426 KB
english, 2007
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