Work Function Tuning of Ti[sub x]Si[sub y]N[sub z] Electrodes Using Partial Saturation of Chemisorbing Surface during Pulsing Chemical Vapor Deposition
Fillot, F., Maı̂trejean, S., Pierre, F., Chenevier, B.Volume:
12
Year:
2009
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3126495
File:
PDF, 291 KB
english, 2009