Characterization of the hardness and the substrate fluxes during reactive magnetron sputtering of TiN
S. Mahieu, D. Depla, R. De GryseVolume:
202
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2007.09.002
File:
PDF, 400 KB
english, 2008