The effect of applied substrate negative bias voltage on...

Surface and Coatings Technology 2008 Vol. 202; Iss. 12

The effect of applied substrate negative bias voltage on the structure and properties of Al-containing a-C:H thin films

Guangan Zhang, Pengxun Yan, Peng Wang, Youming Chen, Junying Zhang, Liping Wang, Junyan Zhang
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Volume:
202
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2007.09.051
File:
PDF, 1.25 MB
english, 2008
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