Co-deposition process of RF-Sputtering and RF-PECVD of copper/carbon nanocomposite films
T. Ghodselahi, M.A. Vesaghi, A. Shafiekhani, A. Baradaran, A. Karimi, Z. MobiniVolume:
202
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2007.10.009
File:
PDF, 674 KB
english, 2008