Silicon oxynitride gas barrier coatings on poly(ether...

Silicon oxynitride gas barrier coatings on poly(ether sulfone) by plasma-enhanced chemical vapor deposition

Juno Shim, Ho Gyu Yoon, Sang-Hyun Na, Insun Kim, Soonjong Kwak
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Volume:
202
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2007.10.020
File:
PDF, 567 KB
english, 2008
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