Influence of substrate bias, deposition temperature and post-deposition annealing on the structure and properties of multi-principal-component (AlCrMoSiTi)N coatings
Hui-Wen Chang, Ping-Kang Huang, Jien-Wei Yeh, Andrew Davison, Chun-Huei Tsau, Chih-Chao YangVolume:
202
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.surfcoat.2007.12.014
File:
PDF, 726 KB
english, 2008