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Rapid Synthesis of Dielectric Films by Microwave Assisted CVD
Ndiege, Nicholas, Subramanian, Vaidyanathan, Shannon, Mark, Masel, RichVolume:
929
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0929-II02-06
Date:
January, 2006
File:
PDF, 4.13 MB
english, 2006