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Correlation between mechanical, optical and chemical properties of thin films deposited by PECVD
V. Cech, J. Studynka, B. Cechalova, J. Mistrik, J. ZemekVolume:
202
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2008.06.031
File:
PDF, 213 KB
english, 2008