Large area SiH4/H2 VHF plasma produced at high pressure...

Surface and Coatings Technology 2008 Vol. 202; Iss. 22-23

Large area SiH4/H2 VHF plasma produced at high pressure using multi-rod electrode

Yasuhiro Yamauchi, Yoshiaki Takeuchi, Hiromu Takatsuka, Yuichi Kai, Hiroshi Muta, Yoshinobu Kawai
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Volume:
202
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2008.06.041
File:
PDF, 521 KB
english, 2008
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