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Electrical characterization of low-k films with nano-pore structure prepared with DMDMOS/O2 precursors
Chang Young Kim, R. Navamathavan, Heon Ju Lee, Chi Kyu ChoiVolume:
202
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2008.06.044
File:
PDF, 801 KB
english, 2008