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Effect of deposition processes on residual stress profiles along the thickness in (Ti,Al)N films
Sheng-Sheng Zhao, Ying Yang, Jia-Bao Li, Jun Gong, Chao SunVolume:
202
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2008.06.048
File:
PDF, 815 KB
english, 2008