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Microstructure and mechanical properties of SiCN hard films deposited by an arc enhanced magnetic sputtering hybrid system
Shengli Ma, Bin Xu, Guizhi Wu, Yanfeng Wang, Fei Ma, Dayan Ma, Kewei Xu, Tom BellVolume:
202
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2008.06.057
File:
PDF, 748 KB
english, 2008