![](/img/cover-not-exists.png)
A novel pulsing method for the enhancement of the deposition rate in high power pulsed magnetron sputtering
Jung-Hwan In, Sang-Hun Seo, Hong-Young ChangVolume:
202
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2008.06.141
File:
PDF, 513 KB
english, 2008