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Diffusion barriers performance of amorphous Ta–Zr films in Cu metallization
Chuan Li, J.H. Hsieh, Z.Z. TangVolume:
202
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.surfcoat.2008.06.152
File:
PDF, 663 KB
english, 2008