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Nanoscale surface and interface engineering: Why plasma-aided?
K. Ostrikov, S. Xu, S.Y. Huang, I. LevchenkoVolume:
202
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.surfcoat.2008.06.165
File:
PDF, 1006 KB
english, 2008