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Fluorinated, Low Thermal Expansion Coefficient Polyimides For Interlayer Dielectric Application: Thermal Stability, Refractive Index And High Temperature Modulus Measurements
Auman, Brian C.Volume:
381
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-381-19
Date:
January, 1995
File:
PDF, 532 KB
english, 1995