Synthesis of Silicon Carbonitride for the Machining of...

MRS Proceedings 2006 / 1 Vol. 924

Synthesis of Silicon Carbonitride for the Machining of Resonant Nanomechanical Biosensors

Fishcer, Lee M., Wilding, Neal, Gel, Murat, Evoy, Stephane
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Volume:
924
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0924-Z08-12
Date:
January, 2006
File:
PDF, 1.00 MB
english, 2006
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