X-ray reflectivity studies on DLC films deposited by...

Surface and Coatings Technology 2009 Vol. 203; Iss. 8

X-ray reflectivity studies on DLC films deposited by microwave ECR CVD: Effect of substrate bias

S.B. Singh, A.K. Poswal, M. Pandey, R.B. Tokas, N. Chand, S. Dhara, B. Sundaravel, K.G.M. Nair, N.K. Sahoo, D.S. Patil
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Volume:
203
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2008.09.022
File:
PDF, 642 KB
english, 2009
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