Investigations on a nitriding process of molybdenum thin films exposed to (Ar–N2–H2) expanding microwave plasma
I. Jauberteau, J.L. Jauberteau, P. Goudeau, B. Soulestin, M. Marteau, M. Cahoreau, J. AubretonVolume:
203
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2008.10.012
File:
PDF, 968 KB
english, 2009