Residual Stress in CVD-grown 3C-SiC Films on Si Substrates

MRS Proceedings 2008 / 1 Vol. 1069

Residual Stress in CVD-grown 3C-SiC Films on Si Substrates

Volinsky, Alex A., Kravchenko, Grygoriy, Waters, Patrick, Reddy, Jayadeep Deva, Locke, Chris, Frewin, Christopher, Saddow, Stephen E.
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Volume:
1069
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1069-D03-05
Date:
January, 2008
File:
PDF, 846 KB
english, 2008
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