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Fabrication of nano structures in thin membranes with focused ion beam technology
V.J. Gadgil, H.D. Tong, Y. Cesa, M.L. BenninkVolume:
203
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.surfcoat.2009.02.036
File:
PDF, 1.37 MB
english, 2009